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3.2. Sensor Specifications Setting

3.2. Sensor Specifications Setting​

 

1.   Access Path

- Accessible only with the engineer or high mode

- F2.System → 3: Robot Parameters → 12: System Maintenance → 4: Vacuum Robot Sensor Setting

 

2.   Settings Screen

 

Figure3.2 Sensor Setting Dialog

 

 

3.   Descriptions and Setting Ranges of Items

1Quantity of temperature sensors

è  Setting range: 0–8

 

2Quantity of fiber sensors

è  Setting range: 0–8

 

3Quantity of flow sensors

è  Setting range: 0–4

 

4Upper/lower limits of temperature sensors

-   Depends on the type of temperature sensor

 

Table 3‑1 Ranges by Types of Temperature Sensors

Type of Temperature Sensor

Temperature Range (°C)

K, J

-100°C–500°C

T

-100°C–400°C

R

0°C–1500°C

 

5Setting range and sensing mode of fiber sensor

-   Depending on sensing modes

 

Table 3‑2 Ranges by Types of Fiber Sensors

Sensing Mode

Description

Setting Range

1

High-Speed(H-SP)

50–4,000

2

Fast (FAST)

50–4,000

3

Reduce

Not used

4

Standard (STD)

50–4,000

5

Standard Fine

Not used

6

Long (LONG)

50–8,000

7

Ultralong (U-LG)

50–9,999

8

Hyper (HYPR)

50–9,999

 

⑥ Upper/lower limits of flow sensors

è  Setting range: -1,100–1,100 (l/min)