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4.1. Error Messages

4.1. Error Messages

 

 

■ Code:

E21031

■Description:

A measured value from the vacuum robot temperature sensor is smaller than the reference value.

■ Cause:

The measured temperature value from the vacuum robot temperature sensor is smaller than the min. setting value.

■ Action:

Check the setting in the vacuum robot sensor setting dialog, and fix any issues.

 

■ Code:

E21032

■Description:

A measured value from the vacuum robot temperature sensor is larger than the reference value.

■ Cause:

The measured temperature value from the vacuum robot temperature sensor is larger than the max. setting value.

■ Action:

Check the setting in the vacuum robot sensor setting dialog, and fix any issues.

 

■ Code:

E21033

■Description:

A measured value from the vacuum robot flow sensor is smaller than the reference value.

■ Cause:

The measured flow value from the vacuum robot flow sensor is smaller than the min. setting value.

■ Action:

Check the setting in the vacuum robot sensor setting dialog, and fix any issues.

 

■ Code:

E21034

■Description:

A measured value from the vacuum robot flow sensor is larger than the reference value.

■ Cause:

The measured flow value from the vacuum robot flow sensor is larger than the max. setting value.

■ Action:

Check the setting in the vacuum robot sensor setting dialog, and fix any issues.

 

 

■ Code:

E21036

■Description:

The number of flow sensors for the vacuum robot does not match.

■ Cause:

The number of flow sensors recognized for the vacuum robot does not match with the number of sensors set for the vacuum robot.

■ Action:

1) Check whether the number of flow sensors is normal in the sensor setting dialog box for a vacuum robot, and take corrective action if any abnormality is found.

2) Check whether there is a flow sensor disconnected.

 

 

■ Code:

E21037

■Description:

The number of fiber sensors for the vacuum robot does not match.

■ Cause:

The number of fiber sensors recognized for the vacuum robot does not match with the number of sensors set for the vacuum robot..

■ Action:

1) Check whether the number of fiber sensors is normal in the sensor setting dialog box for the vacuum robot, and take corrective action if any abnormality is found.

2) Check whether there is a fiber sensor disconnected.