1.1. Vacuum Robot Sensor Monitoring Function

1.1. Vacuum Robot Sensor Monitoring Function

 

The vacuum robot sensor monitoring function is used to monitor and control the states of the following sensors through Ethernet/IP communication: internal temperature sensor (hereinafter “temperature sensor”), cooling airflow sensor (hereinafter “flow sensor”), and glass detection sensor (hereinafter “fiber sensor”).

 

In this regard, there are functions to set individual sensors’ specifications and display their state information.

 

The quantities, upper/lower limits, and modes of the individual sensors can be indicated when setting their specifications.

 

Sensor state monitoring indicates the current state and abnormalities (using a color) of a sensor.