3.2.1. Overview of Reference Run

3.2.1. Overview of Reference Run

 

After the tool is properly installed, the measurement and movement should be performed to save the reference data. This reference data will be used as comparison data for tool calibration. The work of creating such reference data is called reference run. Individual reference data will be divided into 2D, 3D, and 5D data according to the setting of the measurement dimension. In the case of 2D, the double-circle will be measured once, in the case of 3D, the double-circle and oscillation will be measured once, and in the case of 5D, the first double-circle oscillation and second double-circle will be measured.